Imprint

NEW

Budget-friendly optical,
non-contact film thickness measurement

See the new
MicroSpy live at
Laser 2009 in Munich at
FRT stand 443, hall B2

Non-contact film thickness measurement

Easy to use, fast measurement

Integrated CCD-camera with sample illumination

Thickness measurement for thin films

FRT MicroSpy® FT: The new tool
for film thickness measurement

The MicroSpy® FT is a new single-sensor measuring tool for easy, non-contact film thickness measurements of coatings that are transparent or semi-transparent in the visible or invisible spectrum of light (e.g. infrared). Even very thin films of a few nanometers can be reliably measured which makes this tool a perfect addition to R&D and Quality Control departments in many high-tech industries.
The right measurement technology for every coating
The system is installed with an optical film thickness
sensor based on either interferometric or reflectometric technology, which enables the tool to non-destructively measure films of a few millimeters down to just 10 nanometers in thickness. Self supported films (e.g. foils), single coatings or stacked films on a substrate can be reliably measured. Also, materials such as silicon, which is opaque in visible light and transparent in infrared can be handled due to a rich selection of sensors which are available with various light sources, spot sizes and thickness measurement ranges.


Multiple Applications

There are multiple applications possible within film thickness measurement, especially of thin films. Typical tasks are located in the field of (thin film) photovoltaics, medical technology, semiconductor, flat-panel display
and OLED production or the glass and optical industries.

Typical films and film stacks that are measured are:

  • film thickness of an Anti-Reflective Coating (ARC)
  • film thickness of Photoresist (e.g. AZ photoresist)
  • film thickness of a Hard Coating
  • film thickness of Thin Conductive Oxides (TCO)
  • film thickness of Tin Doped Indium Oxides (ITO)
  • film thickness of Drug Eluting Films


3D-Visualization of Film Thickness

The new MicroSpy® FT allows not only to conduct punctual and profile thickness measurements but furthermore features an innovative 3D-Mapping Mode that allows the evenness determination of the film thickness distribution on a larger sample area.

Manufacturers of coated products such as solar cells, technical glas, blood glucose test strips, CD's and DVD's
as well as semiconductor and MST products use 3D film thickness maps to quickly identify possible failure sources and new potentials for optimization in their coating processes.

Superior precision based on up to 100 Million
single measurement points!

To generate the 3D mapping of a film, the coated surface is
scanned in a non-contact fashion. This is achieved with a motorized positioning table that moves the sample below the optical film thickness sensor in x and y directions. During this procedure, up to 100 Million different measurement points are generated which are then automatically combined into a high-resolution 3D representation of the coating.

The 3D film thickness mapping allows the determination of detailed information about thickness values at a specific position of a given profile or of the coating's evenness in general.

    

Precise Film Thickness Measurements with Powerful Hardware

Despite its small footprint, the MicroSpy® FT offers superior performance and easy-operation. This is reflected through useful features such as an integrated CCD-camera with additional illumination which creates a preview image of the sample's surface in the measurement software while it is being brought into the right position. The preview image is very helpful to quickly create high-quality measurements - not only for experienced users but also for new users who will be capable to use the tool with minimal training required.


The system's sensor is manually approached with a high-precision z-axis with micrometer resolution usually found in only the very highest quality optical microscopes.
Reliably measure film thickness on larger samples

The MicroSpy® FT is equipped with a motorized positioning table with high accuracy that perfectly fits to the available selection of FRT's various film thickness sensors. The overall table size of 145 mm x 145 mm and its travel range of 50 mm x 50 mm offer sufficient space for the investigation of film thickness even on larger samples. For secure object fixture a grid of tapped holes allows easy fastening of custom sample holders.

Complete package with hard- and software

The scope of delivery includes beside the film thickness measuring tool with a single sensor of choice, a reliable industry-grade PC, the data analysis software FRT Mark III and the analysis software FRT Acquire that allows to define and re-use measurement tasks (basic automation).

Film thickness measurements based on scientific research
 To perfectly solve the given measurement task, the MicroSpy® FT is equipped with one out of FRT's optical film thickness sensors.
Choose between film thickness analyses by means of Fourier-Transformation (FFT) or by spectral-fit (N&K Database) which allows to measure nanometer thin films as small as 10 nm. FRT surface experts will always consult you in finding best possible measurement solution for your specific application.


Superior price-performance ratio

As a highly standardized metrology tool, the MicroSpy® FT offers a superior price-performance ratio. At the same time, its measuring technology is of the same industry-proven quality as FRT's Multisensor Tools with full automation and part handling.

 

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FRT, Fries Research & Technology GmbH
Telefon: +49 (0)2204-84 2430
Email: info@frt-gmbh.com
Internet: http://www.frt-gmbh.com


Datasheet FRT MicroSpy® FT